.gitignore
Changes
cpanfile
examples/etch_aluminum_silicide.pl
examples/etch_chamber_geometry.pl
examples/etch_copper.pl
examples/etch_gdsii_simulation.pl
examples/etch_loading_effect.pl
examples/etch_photoresist_ash.pl
examples/etch_photoresist_strip.pl
examples/etch_polyimide.pl
examples/etch_silicon_nitride.pl
examples/etch_tantalum.pl
examples/etch_titanium.pl
examples/make_sample_mask.pl
examples/sample_mask.gds
lib/Physics/Etch.pm
lib/Physics/Etch/Chamber.pm
lib/Physics/Etch/DryEtch.pm
lib/Physics/Etch/Etchant.pm
lib/Physics/Etch/GDSII.pm
lib/Physics/Etch/Layout.pm
lib/Physics/Etch/Loading.pm
lib/Physics/Etch/Material.pm
lib/Physics/Etch/Process.pm
lib/Physics/Etch/Simulation.pm
lib/Physics/Etch/WetEtch.pm
LICENSE
Makefile.PL
MANIFEST			This list of files
MANIFEST.SKIP
README.md
t/00-load.t
t/10-wet.t
t/20-dry.t
t/30-facade.t
t/40-gdsii.t
t/50-layout.t
t/60-chamber.t
t/70-loading.t
t/80-simulation.t
META.yml                                 Module YAML meta-data (added by MakeMaker)
META.json                                Module JSON meta-data (added by MakeMaker)
